✦ LIBER ✦
Structural Comparison of Hydrogen Silsesquioxane Based Porous Low- k Thin Films Prepared with Varying Process Conditions
✍ Scribed by Lee, Hae-Jeong; Lin, Eric K.; Wang, Howard; Wu, Wen-li; Chen, Wei; Moyer, Eric S.
- Book ID
- 126934092
- Publisher
- American Chemical Society
- Year
- 2002
- Tongue
- English
- Weight
- 163 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0897-4756
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