✦ LIBER ✦

Mask topography effects in projection printing of phase-shifting masks

✍ Scribed by Wong, A.K.; Neureuther, A.R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Investigation of phase shift mask distor

✍ Jinglei Du; Zheng Cui; XiaoCong Yuan; Yongkang Guo 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 300 KB

The effect of duty ratio in phase shift

✍ B.P. Mathur; K.I. Arshak 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 303 KB

Initialization for robust inverse synthe

✍ Chan, Stanley H.; Wong, Alfred K.; Lam, Edmund Y. 📂 Article 📅 2008 🏛 Optical Society of America 🌐 English ⚖ 871 KB

Aberration measurement of projection opt

✍ Wang, Fan ;Wang, Xiangzhao ;Ma, Mingying ;Zhang, Dongqing ;Shi, Weijie ;Hu, Jian 📂 Article 📅 2006 🏛 The Optical Society 🌐 English ⚖ 529 KB

Split of phase shifts in a phase mask fo

✍ Y. Sheng; J.E. Rothenberg; Hongpu Li; Ying Wang; J. Zweiback 📂 Article 📅 2004 🏛 IEEE 🌐 English ⚖ 187 KB

Aberration-induced intensity imbalance o

✍ Peng, Bo; Wang, Xiangzhao; Qiu, Zicheng; Yuan, Qiongyan; Cao, Yuting 📂 Article 📅 2010 🏛 Optical Society of America 🌐 English ⚖ 274 KB