Aberration-induced intensity imbalance of alternating phase-shifting mask in lithographic imaging

✍ Scribed by Peng, Bo; Wang, Xiangzhao; Qiu, Zicheng; Yuan, Qiongyan; Cao, Yuting

• Book ID: 115433140
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 274 KB
• Volume: 35
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.35.001404