Even aberration measurement of lithographic projection optics based on intensity difference of adjacent peaks in alternating phase-shifting mask image

✍ Scribed by Peng, Bo ;Wang, Xiangzhao ;Qiu, Zicheng ;Cao, Yuting ;Duan, Lifeng

• Book ID: 115355127
• Publisher: The Optical Society
• Year: 2010
• Tongue: English
• Weight: 861 KB
• Volume: 49
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.49.002753