✦ LIBER ✦

Mark detection technology in electron-beam direct writing

✍ Scribed by Kashiwaki, T.; Morimoto, H.; Takeuchi, S.; Saitoh, K.; Watakabe, Y.; Kato, T.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electron Beam Direct Writing technology

✍ Yasuhide Machida; Takashi Maruyama; Yoshinori Kojima; Shinji Sugatani; Haruo Tsu 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 370 KB

Submicrometer electron-beam direct writi

✍ Matsuda, T.; Miyoshi, K.; Yamaguchi, R.; Moriya, S.; Hosoya, T.; Harada, K. 📂 Article 📅 1985 🏛 IEEE 🌐 English ⚖ 908 KB

Variable-shaped electron-beam direct wri

✍ Sakakibara, Y.; Ogawa, T.; Komatsu, K.; Moriya, S.; Kobayashi, M.; Kobayashi, T. 📂 Article 📅 1981 🏛 IEEE 🌐 English ⚖ 864 KB

Resolution limit of E-beam direct writin

✍ Toyoki Kitayama; Toshiaki Tamamura; Katsuhiro Harada 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 224 KB

DC-SQUIDs fabricated by electron beam di

✍ Carelli, P.; Foglietti, V.; Leoni, R. 📂 Article 📅 1987 🏛 IEEE 🌐 English ⚖ 546 KB

Magnetic Nanostructures Produced By Elec

✍ Wang, J.P. ;Zhao, Y. ;Zhou, T.J. ;Thong, J.T.L. ;Chong, T.C. 📂 Article 📅 2003 🏛 Cambridge University Press ⚖ 569 KB