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Mapping of electrically active defects in silicon by optical-beam-induced reflectance

✍ Scribed by Gary E. Carver; John D. Michalski; Bahiru Kassahun; Greg Astfalk

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 636 KB
Volume: 4
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(89)90289-4

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