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Manifestation of Hydrogen in Al-SiO2-Si Structures Subjected to a RF Plasma Annealing

✍ Scribed by Lysenko, V. S. ;Nazarov, A. N. ;Naumovets, G. A. ;Popov, V. B. ;Tkachenko, A. S.

Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 187 KB
Volume: 112
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211120163

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