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Magnetron sputtering: a review of recent developments and applications

✍ Scribed by P.J Kelly; R.D Arnell

Book ID: 108390549
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 846 KB
Volume: 56
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(99)00189-x

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