ChemInform Abstract: Recent Aspects Concerning DC Reactive Magnetron Sputtering of Thin Films: A Review

✍ Scribed by I. Safi

• Publisher: John Wiley and Sons
• Year: 2000
• Weight: 23 KB
• Volume: 31
• Category: Article
• ISSN: 0931-7597
• DOI: 10.1002/chin.200043233