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Magnetron sputtered a-SiOxNy thin films: A closed porous nanostructure with controlled optical and mechanical properties

✍ Scribed by V. Godinho; T.C. Rojas; A. Fernandez

Book ID
113800217
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
591 KB
Volume
149
Category
Article
ISSN
1387-1811

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