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Optical and transport properties of magnetron-sputtered a-Si:H films doped with erbium

✍ Scribed by D Dimova-Malinovska; R Northcott; M Nikolaeva; M Sendova-Vassileva; A Janotta; M Schmidt; J.M Marshall


Book ID
117145670
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
141 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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Structural and optical properties of a-S
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Hydrogenated amorphous SiC films (a-Si 1-x C x :H) were prepared by dc magnetron sputtering technique on p-type Si(1 0 0) and corning 9075 substrates at low temperature, by using 32 sprigs of silicon carbide (6H-SiC). The deposited a-Si 1-x C x :H film was realized under a mixture of argon and hydro