Magnetron discharge in an argon-oxygen mixture for deposition of a titanium oxide film

✍ Scribed by Komlev, A. E.; Shapovalov, V. I.; Shutova, N. S.

• Book ID: 114992805
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 158 KB
• Volume: 57
• Category: Article
• ISSN: 1063-7842
• DOI: 10.1134/s1063784212070122