Macroparticle separation and plasma collimation in positively biased ducts in filtered vacuum arc deposition systems

✍ Scribed by Beilis, I. I.; Keidar, M.; Boxman, R. L.; Goldsmith, S.

• Book ID: 121298046
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 414 KB
• Volume: 85
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.369267