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Macroparticle distribution in a quarter-torus plasma duct of a filtered vacuum arc deposition system

โœ Scribed by Keidar, M; Beilis, I I; Aharonov, R; Arbilly, D; Boxman, R L; Goldsmith, S


Book ID
121314049
Publisher
Institute of Physics
Year
1997
Tongue
English
Weight
235 KB
Volume
30
Category
Article
ISSN
0022-3727

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