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Ion current distribution in a filtered vacuum arc deposition system

✍ Scribed by V.N. Zhitomirsky; L. Kaplan; R.L. Boxman; S. Goldsmith


Book ID
107930460
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
612 KB
Volume
76-77
Category
Article
ISSN
0257-8972

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