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The effect of additional ion/plasma assistance in CNx-film deposition based on a filtered cathodic arc

✍ Scribed by M Kühn; C Spaeth; R Pintaske; S Peter; F Richter; A Anders

Book ID: 108389225
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 145 KB
Volume: 311
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00470-7

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