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SPIE Proceedings [SPIE XVI International Symposium on Discharges and Electrical Insulation in Vacuum - Moscow-St. Petersburg, Russia (Monday 23 May 1994)] XVI International Symposium on Discharges and Electrical Insulation in Vacuum - Vacuum-arc plasma deposition: macroparticle filtering, scaling, and other problems

✍ Scribed by Anders, Andre; Anders, Simone; Brown, Ian G.; MacGill, Robert A.; Dickinson, Michael R.; Mesyats, Gennady A.

Book ID: 121467334
Publisher: SPIE
Year: 1994
Weight: 244 KB
Volume: 2259
Category: Article
DOI: 10.1117/12.174640

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