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Luminescence and microstructure of Er/O co-doped Si structures grown by MBE using Er and SiO evaporation

โœ Scribed by F Duteil; C.-X Du; K.B Joelsson; P.O.A Persson; L Hultman; G Pozina; W.-X Ni; G.V Hansson


Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
385 KB
Volume
3
Category
Article
ISSN
1369-8001

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โœ P. Singh; F. Gourbilleau; C. Dufour; M. Levalois; J. Vicens; R. Rizk; P. Pellegr ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 340 KB

Erbium and silicon co-doped silica films have been fabricated by reactive magnetron sputtering. A correlation is made between the microstructure monitored by the hydrogen rate r H in the plasma and the photoluminescence properties. The erbium emission at 1.54 m is enhanced by the increase of r H whi