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Low-temperature silicon direct bonding and interface behaviours

✍ Scribed by Jiwei Jiao; Deren Lu; Bin Xiong; Weiyuan Wang

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 413 KB
Volume: 50
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(96)80094-x

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