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N+ plasma-assisted wafer bonding between silicon and chemical vapor deposition oxide at low temperature

✍ Scribed by Xiaobo Ma; Weili Liu; Chao Chen; Jiayi Xu; Zhitang Song; Chenglu Lin

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 567 KB
Volume: 12
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2009.09.010

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