Low temperature annealing behaviour of two species (argon and antimony) implanted silicon

✍ Scribed by P. Spinelli; M. Bruel

• Publisher: Elsevier Science
• Year: 1983
• Weight: 197 KB
• Volume: 209-210
• Category: Article
• ISSN: 0167-5087
• DOI: 10.1016/0167-5087(83)90878-5