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Low temperature Si layer transfer by direct bonding and mechanical ion cut

✍ Scribed by Cho, Y.; Cheung, N. W.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Low-temperature epitaxial crystallizatio

✍ M.C. Ridgway; R.G. Elliman; J.S. Williams 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 448 KB