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Low temperature reaction of point defects in ion irradiated 4H–SiC

✍ Scribed by Litrico, G.; Izzo, G.; Calcagno, L.; Via, F. La; Foti, G.


Book ID
123539089
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
322 KB
Volume
18
Category
Article
ISSN
0925-9635

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Point defects reactions in ion irradiate
✍ G. Litrico; M. Zimbone; G. Baratta; A.D.M. Marino; P. Musumeci; L. Calcagno 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 470 KB

The defects produced in 4H-SiC epitaxial layers by irradiation with 800 keV C + were characterized by Low Temperature Photoluminescence. Ion beam irradiation induces the formation of some sharp lines in the wavelength range 428-441 nm of the photoluminescence spectra, that are typically known as ''a