Point defects reactions in ion irradiate
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G. Litrico; M. Zimbone; G. Baratta; A.D.M. Marino; P. Musumeci; L. Calcagno
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Article
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2010
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Elsevier Science
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English
⚖ 470 KB
The defects produced in 4H-SiC epitaxial layers by irradiation with 800 keV C + were characterized by Low Temperature Photoluminescence. Ion beam irradiation induces the formation of some sharp lines in the wavelength range 428-441 nm of the photoluminescence spectra, that are typically known as ''a