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Low temperature pulsed laser deposition of textured γ′-Fe4N films on Si (1 0 0)

✍ Scribed by Lei Zhang; Tianyu Ma; Zubair Ahmad; Tianzhi Yuan; Cong Lu; Yongbing Xu; Mi Yan


Book ID
116608080
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
702 KB
Volume
509
Category
Article
ISSN
0925-8388

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We report on the pulsed-laser deposition of high-K praseodymium oxide films onto Si(1 0 0) surfaces by laser-ablating a sintered Pr 6 O 11 target. Optical microscope, SEM, and AFM investigations reveal two kinds of Pr x O y -surface structures, which are identified as: (a) large-scaled particles, an