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Low temperature processes MOSFET's using laser recrystallized polycrystalline silicon films: Han-Sheing Lee Solid St. Electron. 26, (11) 1123 (1983)

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 95 KB
Volume: 16
Category: Article
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(85)80165-8

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