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Low-temperature plasma pulsed deposition of thin films with nanoscale periodicity of properties

โœ Scribed by A. A. Serdobintsev; A. G. Veselov; O. A. Kiryasova; S. A. Portnov; D. N. Bratashov


Book ID
111444365
Publisher
Springer
Year
2009
Tongue
English
Weight
156 KB
Volume
43
Category
Article
ISSN
1063-7826

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