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Low-Temperature PECVD of Nanodevice-Grade nc-3C-SiC

✍ Scribed by Q. J. Cheng; S. Y. Xu; J. D. Long; K. Ostrikov


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
866 KB
Volume
13
Category
Article
ISSN
0948-1907

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