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Low temperature deposition of ZnO semiconductor thin films on a PEN substrate by a solution process

✍ Scribed by Chien-Yie Tsay, Pei-Wen Wu

Book ID
120723244
Publisher
The Korean Institute of Metals and Materials
Year
2013
Tongue
English
Weight
348 KB
Volume
9
Category
Article
ISSN
1738-8090

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al