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Low-resistivity indium tantalum oxide films by magnetron sputtering

✍ Scribed by H. Ju; S. Hwang; C.-O. Jeong; S.-H. Park; J.-G. Choi; C. Park


Book ID
106019264
Publisher
Springer
Year
2004
Tongue
English
Weight
144 KB
Volume
79
Category
Article
ISSN
1432-0630

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