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Low resistance ohmic contacts on AlGaN/GaN structures using implantation and the âadvancingâ Al/Ti metallization

✍ Scribed by Qiao, D.; Guan, Z. F.; Carlton, J.; Lau, S. S.; Sullivan, G. J.

No coin nor oath required. For personal study only.

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Low resistance ohmic contacts on AlGaN/GaN structures using implantation and the âadvancingâ Al/Ti metallization