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Low Pressure Chemical Vapor Deposition of In Situ Boron-Doped Polysilicon

✍ Scribed by Maritan, C. M.

Book ID
127022965
Publisher
The Electrochemical Society
Year
1988
Tongue
English
Weight
463 KB
Volume
135
Category
Article
ISSN
0013-4651

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Modulation-doped silicate glass deposite
Modulation-doped silicate glass deposited by low-pressure chemical vapor deposition
✍ M. Ilg; M. Kraxenberger; K. Uram; N. Sandler; C. Parks; S. Nguyen πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 305 KB

We demonstrate the synthesis of modulation-doped silicate glass. Secondary ion mass spectroscopy measurements show the B and P concentrations to strongly oscillate on a nanometre-scale. This finding is confirmed by scanning-electron microscopy. Finally we show that this novel type of material has ga