✦ LIBER ✦

Low-Pressure Chemical Vapor Deposition

✍ Scribed by Hersee, S D; Duchemin, J P

Book ID: 120409184
Publisher: Annual Reviews
Year: 1982
Tongue: English
Weight: 608 KB
Volume: 12
Category: Article
ISSN: 0084-6600
DOI: 10.1146/annurev.ms.12.080182.000433

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