Low- k Interlayer Dielectric Materials: Synthesis and Properties of Alkoxy-Functional Silsesquioxanes

✍ Scribed by Su, Kai; Bujalski, Duane R.; Eguchi, Katsuya; Gordon, Glenn V.; Ou, Duan-Li; Chevalier, Pierre; Hu, Sanlin; Boisvert, Ronald P.

• Book ID: 126428835
• Publisher: American Chemical Society
• Year: 2005
• Tongue: English
• Weight: 393 KB
• Volume: 17
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm048993d