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Low hydrogen content a-Si:H produced by layer by layer deposition technique

✍ Scribed by Young-Jin Lim; Jin Jang; Choochon Lee

Book ID: 117147092
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 208 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80218-2

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