Investigation of nc-Si inclusions in multilayer a-Si:H films obtained using the layer by layer technique

✍ Scribed by A.S. Gudovskikh; J.P. Kleider; V.P. Afanasjev; A.Z. Kazak-Kazakevich; A.P. Sazanov

• Book ID: 116667683
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 320 KB
• Volume: 338-340
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2004.02.038