𝔖 Bobbio Scriptorium
✦   LIBER   ✦

LOW FREQUENCY GLOW DISCHARGE HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS

✍ Scribed by Gat, E.; Cros, B.; Berjoan, R.; Durand, J.


Book ID
121339776
Publisher
Taylor and Francis Group
Year
1992
Tongue
English
Weight
379 KB
Volume
7
Category
Article
ISSN
1042-6914

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R.f. glow discharge optical spectroscopy (GDOS) is demonstrated to be a useful technique with which to measure absolute dopant concentrations in hydrogenated amorphous silicon (a-Si:H) films. The measurement technique and method of calibration are described. GDOS measurements of boron concentrations