Low energy positron beam studies of nano-TiN films
β Scribed by Huimin Weng; Dazhi Wang; Rongdian Han; Yi Jiang; Genqing Yang; Xianghuai Liu
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 270 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0921-5107
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π SIMILAR VOLUMES
In summer 2004 the NEutron-induced POsitron source MUniCh-NEPOMUC-of the new Munich research reactor FRM-II was set into operation at the nominal reactor power of 20 MW. With this novel facility one of the worlds most intense low-energy positron beam is now available. Intensity and positron beam pro
Ion-beam and low-energy positron-beam techniques have been used to study damage and implanted ion distributions and their annealing behavior in semi-insulating GaAs after the room temperature implantation of 3 Γ 10~-1 x 10 ~7 60 keV H' cm -'. The redistribution of the implanted H during annealing wa
A study was performed to investigate the influence of process parameters on the properties of TiN films deposited by ion beam mixing. Relatively dense and homogeneous structures or dense columnar structures were observed by scanning electron microscopy. From the results of X-ray diffraction and X-ra