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Low-Energy Plasma Focus as a Tailored X-Ray Source

โœ Scribed by M. Zakaullah; K. Alamgir; M. Shafiq; M. Sharif; A. Waheed; G. Murtaza


Book ID
110326089
Publisher
Springer
Year
2000
Tongue
English
Weight
210 KB
Volume
19
Category
Article
ISSN
0164-0313

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Low debris laser plasma soft X-ray source is of great importance to micro-lithography and microscopy. In this paper, a 1.06 mm YAG laser with 2 J energy, 10 ns duration is employed to irradiate a CO 2 cryogenic target. Soft X-ray spectra from the CO 2 cryogenic target are obtained. Experimental resu