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Low energy ion beam damage of semiconductor surfaces: a detailed study of InSb(100) using electron energy loss spectroscopy

✍ Scribed by T.S. Jones; M.Q. Ding; N.V. Richardson; C.F. McConville

Publisher: Elsevier Science
Year: 1991
Weight: 77 KB
Volume: 247
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(91)90649-c

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