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Low energy ion beam annealing of incompletely amorphised layers in Si

✍ Scribed by B. Zeroual; G. Carter

Book ID: 113281061
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 893 KB
Volume: 44
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(90)90645-b

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