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Low energy electron beam microcolumn lithography

✍ Scribed by Ho Seob Kim; Young Chul Kim; Dae-Wook Kim; Seung Joon Ahn; Yong Jang; Hyung Woo Kim; Do Jin Seong; Kyoung Wan Park; Seong Soon Park; Byung Jin Kim

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 729 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.099

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