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Efficient electron beam condensing for low-energy microcolumn lithography

✍ Scribed by Ho Seob Kim; Seungjoon Ahn; Dae Wook Kim; Tae-Sik Oh; Seong Joon Ahn

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 690 KB
Volume: 39
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2007.09.030

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