Low-energy double ion-beam deposition of compound films

3108. Thin-film deposition using low-ene

3108. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio

3109. Thin-film deposition using low-ene

3109. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 133 KB

of Ti to a few percent. Pre-evaporation of a 300 ,~ thick CaF.~ parting layer allowed membrane removal by water-assisted peeling. Pressure testing showed membranes to have bulk tensile strength of 4.6-6.2,'< l09 dyn/cm 2 (68-92 kpsi) and to behave elastically. They could be mounted under high tensio

3123. Thin-film deposition using low-ene

3123. Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 139 KB

3124. Thin-film deposition using low-ene

3124. Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 139 KB

Concentration profiles during films depo

Concentration profiles during films deposition from a low-energy ion beam

✍ V. I. Kiprich; G. V. Kornich; A. I. Bazhin 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 326 KB

Low energy ion beam assisted deposition

Low energy ion beam assisted deposition of TiN thin films on silicon

✍ J.-H Huang; C.-H Lin; C.-H Ma; Haydn Chen 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 322 KB