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Low-dose focused ion beam nanofabrication and characterization by atomic force microscopy

✍ Scribed by Huey, B D; Langford, R M

Book ID: 120219742
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 161 KB
Volume: 14
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/14/3/310

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