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Low defect density and planar patterned SOI materials by masked SIMOX

✍ Scribed by Yemin Dong; Xi Wang; Xiang Wang; Meng Chen; Jing Chen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2004 IEEE International SOI Confer

✍ Yemin Dong, ; Meng Chen, ; Jing Chen, ; Xi Wang, 📂 Article 📅 2004 🏛 IEEE ⚖ 164 KB

Reduction of Planar Defect Density in La

✍ S. Sanorpim; E. Takuma; R. Katayama; K. Onabe; H. Ichinose; Y. Shiraki 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 313 KB 👁 2 views