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[IEEE 2004 IEEE International SOI Conference - Charleston, SC, USA (4-7 Oct. 2004)] 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) - Fabrication of high quality patterned SOI materials by optimized low-dose SIMOX

✍ Scribed by Yemin Dong, ; Meng Chen, ; Jing Chen, ; Xi Wang,

Book ID: 115502297
Publisher: IEEE
Year: 2004
Weight: 164 KB
Volume: 0
Category: Article
ISBN-13: 9780780384972
DOI: 10.1109/soi.2004.1391555

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