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Low cycle fatigue of Si3N4/SiO2/Si micro-cantilever beams

✍ Scribed by Hsien-Kuang Liu; Chi-Bin Chou; Shun-Fa Hwang


Book ID
104092757
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
703 KB
Volume
161
Category
Article
ISSN
0924-4247

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