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Low cost anisotropic etching of monocrystalline Si (1 0 0): Optimization using response surface methodology

✍ Scribed by Khuram Ali; Sohail Aziz Khan; Mohd Zubir Mat Jafri

No coin nor oath required. For personal study only.

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Low cost anisotropic etching of monocrystalline Si (1&#xa0;0&#xa0;0): Optimization using response surface methodology