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Loss of material from TiSi2 films during annealing in hydrogen

✍ Scribed by A. Steffen; J. Korec; M. Maier; P. Balk

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 395 KB
Volume: 130
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90360-8

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