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Lorentz force effects on the electron energy distribution in inductively coupled plasmas

โœ Scribed by Godyak, V. A.; Alexandrovich, B. M.; Kolobov, V. I.


Book ID
120309083
Publisher
The American Physical Society
Year
2001
Tongue
English
Weight
244 KB
Volume
64
Category
Article
ISSN
1063-651X

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